Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2024-07-30 |
| 12036635 | Methods of detecting non-conforming substrate processing events during chemical mechanical polishing | Ashish Bhushan, Jamie Stuart Leighton, John Garcia, Stephen Thomas Cormier, Nick Joseph Jackson +2 more | 2024-07-16 |
| 12033865 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2024-07-09 |
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jamie Stuart Leighton, Van H. Nguyen, Roger M. Johnson | 2024-02-27 |
| 11890717 | Polishing system with platen for substrate edge control | Jay Gurusamy, Steven M. Zuniga | 2024-02-06 |