Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen | 2024-02-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen | 2024-02-27 |