Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094740 | Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology | Manoj A. Gajendra, Mahadev Joshi, Joseph Antony Jonathan | 2024-09-17 |
| 12036635 | Methods of detecting non-conforming substrate processing events during chemical mechanical polishing | Jeonghoon Oh, Ashish Bhushan, John Garcia, Stephen Thomas Cormier, Nick Joseph Jackson +2 more | 2024-07-16 |
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Van H. Nguyen, Roger M. Johnson | 2024-02-27 |