Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Jamie Stuart Leighton, Roger M. Johnson | 2024-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Jamie Stuart Leighton, Roger M. Johnson | 2024-02-27 |