Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu +1 more | 2024-07-30 |
| 12030156 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Justin Ho Kuen Wong | 2024-07-09 |
| 12033865 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2024-07-09 |
| 11986923 | Polishing head with local wafer pressure | Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson, Vladimir Galburt | 2024-05-21 |
| 11945073 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Jay Gurusamy | 2024-04-02 |
| 11931857 | Deformable substrate chuck | Steven M. Zuniga, Jay Gurusamy | 2024-03-19 |
| 11904429 | Substrate polishing apparatus with contact extension or adjustable stop | Steven M. Zuniga, Jay Gurusamy | 2024-02-20 |
| 11890715 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Justin Ho Kuen Wong | 2024-02-06 |