| 12128524 |
Membrane for carrier head with segmented substrate chuck |
Steven M. Zuniga |
2024-10-29 |
| 12076877 |
Polishing platens and polishing platen manufacturing methods |
Bum Jick Kim, Danielle Loi, Steven M. Zuniga |
2024-09-03 |
| 12042899 |
Polishing head with membrane position control |
Steven M. Zuniga |
2024-07-23 |
| 11986923 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt |
2024-05-21 |
| 11945073 |
Dual membrane carrier head for chemical mechanical polishing |
Steven M. Zuniga, Andrew J. Nagengast |
2024-04-02 |
| 11931857 |
Deformable substrate chuck |
Steven M. Zuniga, Andrew J. Nagengast |
2024-03-19 |
| 11919120 |
Polishing system with contactless platen edge control |
David J. Lischka, Danielle Loi, Steven M. Zuniga |
2024-03-05 |
| 11904429 |
Substrate polishing apparatus with contact extension or adjustable stop |
Steven M. Zuniga, Andrew J. Nagengast |
2024-02-20 |
| 11890717 |
Polishing system with platen for substrate edge control |
Steven M. Zuniga, Jeonghoon Oh |
2024-02-06 |
