Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142513 | Wafer processing tools and methods thereof | Jagan Rangarajan, Edward Golubovsky, Shaun Van Der Veen, Steven M. Zuniga | 2024-11-12 |
| 12030156 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Andrew J. Nagengast | 2024-07-09 |
| 11929264 | Drying system with integrated substrate alignment stage | — | 2024-03-12 |
| 11890715 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Andrew J. Nagengast | 2024-02-06 |