Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142513 | Wafer processing tools and methods thereof | Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga | 2024-11-12 |
| 11942319 | Pad carrier for horizontal pre-clean module | Jagan Rangarajan, Ekaterina A. Mikhaylichenko | 2024-03-26 |