Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181271 | Estimating in-die overlay with tool induced shift correction | Min-Yeong Moon, Stilian Ivanov Pandev | 2024-12-31 |
| 11921825 | System and method for determining target feature focus in image-based overlay metrology | Etay Lavert, Amnon Manassen, Yossi Simon, Avner Safrani | 2024-03-05 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Liran Yerushalmi +2 more | 2024-01-23 |