Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117721 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov | 2024-10-15 |
| 11960213 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2024-04-16 |
| 11860552 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Teunis Van Dam, Peter Mark Overschie, Theresa Mary Spaan-Burke +1 more | 2024-01-02 |