Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072635 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more | 2024-08-27 |
| 12055862 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2024-08-06 |
| 12032296 | Fluid handling system, method and lithographic apparatus | Yang-Shan Huang | 2024-07-09 |
| 11960213 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2024-04-16 |
| 11860546 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2024-01-02 |