Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032296 | Fluid handling system, method and lithographic apparatus | Nicolaas Ten Kate | 2024-07-09 |
| 11961698 | Replaceable module for a charged particle apparatus | Christiaan OTTEN, Peter-Paul CRANS, Marc Smits, Laura DEL TIN, Christan TEUNISSEN +5 more | 2024-04-16 |