Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055862 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2024-08-06 |
| 11960213 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2024-04-16 |