Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117721 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Sergei Shulepov | 2024-10-15 |
| 12051607 | Substrate positioning device with remote temperature sensor | Patriek Adrianus Alphonsus Maria Bruurs, Dennis Herman Caspar Van Banning, Jan-Gerard Cornelis Van Der Toorn | 2024-07-30 |
| 11942340 | Particle beam inspection apparatus | Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Martijn Petrus Christianus Van Heumen, Erheng WANG +1 more | 2024-03-26 |