Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051562 | Method, apparatus, and system for wafer grounding | Yixiang Wang, Shibing Liu, Shanhui Cao, Kangsheng Qiu, Juying Dou +4 more | 2024-07-30 |
| 12051607 | Substrate positioning device with remote temperature sensor | Patriek Adrianus Alphonsus Maria Bruurs, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk | 2024-07-30 |
| 12028000 | Object table comprising an electrostatic clamp | Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK +6 more | 2024-07-02 |
| 11996263 | Stage apparatus | Paulus Martinus Hubertus Vissers | 2024-05-28 |
| 11908656 | Stage apparatus suitable for a particle beam apparatus | Han Willem Hendrik SEVERT, Ronald Van Der Wilk, Allard Eelco Kooiker | 2024-02-20 |