Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142456 | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system | Jinmei Yang, Jian Zhang, Zhiwen KANG | 2024-11-12 |
| 12142451 | System for inspecting and grounding a mask in a charged particle system | Tianming Chen, Chiyan Kuan, Zhi Wang | 2024-11-12 |
| 12125669 | Thermal-aided inspection by advanced charge controller module in a charged particle system | Ning Ye, Jun Jiang, Jian Zhang | 2024-10-22 |
| D1044531 | Safety laser radar | Hongxiang Zheng, Mingjuan Ding, Xingqiang Wang, Zhenwei WANG, Yubao Sun +7 more | 2024-10-01 |
| 12087542 | Image contrast enhancement in sample inspection | Frank Zhang | 2024-09-10 |
| 12072181 | Inspection apparatus and method | Yan Wang, Jian Zhang, Zhiwen KANG | 2024-08-27 |
| 12051562 | Method, apparatus, and system for wafer grounding | Shibing Liu, Shanhui Cao, Kangsheng Qiu, Juying Dou, Ying Luo +4 more | 2024-07-30 |
| 12028000 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2024-07-02 |
| 11929232 | Systems and methods for charged particle flooding to enhance voltage contrast defect signal | Frank Zhang, Zhongwei Chen, Ying Shen | 2024-03-12 |