Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142456 | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system | Jinmei Yang, Jian Zhang, Yixiang Wang | 2024-11-12 |
| 12072181 | Inspection apparatus and method | Yan Wang, Jian Zhang, Yixiang Wang | 2024-08-27 |