Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142456 | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system | Jian Zhang, Zhiwen KANG, Yixiang Wang | 2024-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142456 | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system | Jian Zhang, Zhiwen KANG, Yixiang Wang | 2024-11-12 |