Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165837 | System and method for scanning a sample using multi-beam inspection apparatus | Martinus Gerardus Johannes Maria MAASSEN, Long Ma, Youfei Jiang, Weihua Yin, Wei Li +1 more | 2024-12-10 |
| 12117721 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov | 2024-10-15 |