Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117736 | Lithographic apparatus | Marcus Adrianus Van De Kerkhof, Satish Achanta, Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Andrey Nikipelov | 2024-10-15 |
| 11860552 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie, Theresa Mary Spaan-Burke +1 more | 2024-01-02 |