Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860552 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Theresa Mary Spaan-Burke +1 more | 2024-01-02 |