Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911870 | Polishing pads for high temperature processing | Sivapackia Ganapathiappan, Rajeev Bajaj, Yingdong Luo, Aniruddh Jagdish Khanna, Daniel Redfield | 2024-02-27 |
| 11897079 | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Brian J. Brown +2 more | 2024-02-13 |