Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106976 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2024-10-01 |
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2024-07-09 |
| 11919123 | Apparatus and method for CMP temperature control | Surajit Kumar, Hui Chen, Shou-Sung Chang | 2024-03-05 |
| 11897079 | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Brian J. Brown, Yen-Chu Yang +2 more | 2024-02-13 |
| 11865671 | Temperature-based in-situ edge assymetry correction during CMP | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hui Chen +1 more | 2024-01-09 |