Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2024-07-09 |
| 11919123 | Apparatus and method for CMP temperature control | Surajit Kumar, Hari Soundararajan, Shou-Sung Chang | 2024-03-05 |
| 11865671 | Temperature-based in-situ edge assymetry correction during CMP | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hari Soundararajan +1 more | 2024-01-09 |