| 12106976 |
Steam-assisted single substrate cleaning process and apparatus |
Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Hari Soundararajan +1 more |
2024-10-01 |
| 12030093 |
Steam treatment stations for chemical mechanical polishing system |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Hui Chen, Chih Chung Chou +2 more |
2024-07-09 |
| 11986926 |
Slurry distribution device for chemical mechanical polishing |
Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Paul D. Butterfield +2 more |
2024-05-21 |
| 11919123 |
Apparatus and method for CMP temperature control |
Surajit Kumar, Hari Soundararajan, Hui Chen |
2024-03-05 |
| 11897079 |
Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity |
Haosheng Wu, Hari Soundararajan, Jianshe Tang, Brian J. Brown, Yen-Chu Yang +2 more |
2024-02-13 |
| 11865671 |
Temperature-based in-situ edge assymetry correction during CMP |
Haosheng Wu, Jianshe Tang, Chih Chung Chou, Hui Chen, Hari Soundararajan +1 more |
2024-01-09 |
