Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2024-05-21 |