Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106976 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more | 2024-10-01 |
| 11951589 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep | 2024-04-09 |
| 11931854 | Chemical mechanical polishing using time share control | Jimin Zhang, Jianshe Tang, Brian J. Brown, Priscilla Diep LaRosa | 2024-03-19 |