Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11951589 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Wei Lu | 2024-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11951589 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Jianshe Tang, Brian J. Brown, Wei Lu | 2024-04-09 |