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Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
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Printing a chemical mechanical polishing pad |
Barry Chin, Terrance Y. Lee |
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Techniques for combining CMP process tracking data with 3D printed CMP consumables |
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Integrated abrasive polishing pads and manufacturing methods |
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Apparatus and method of forming a polishing article that has a desired zeta potential |
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Additive manufacturing of polishing pads |
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CMP pad construction with composite material properties using additive manufacturing processes |
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Polishing pads with interconnected pores |
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Polishing pads for high temperature processing |
Sivapackia Ganapathiappan, Yingdong Luo, Aniruddh Jagdish Khanna, You Wang, Daniel Redfield |
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| 11897079 |
Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity |
Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Brian J. Brown +2 more |
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Structures formed using an additive manufacturing process for regenerating surface texture in situ |
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2024-01-23 |
