Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |
| 11942565 | Solar cell emitter region fabrication using substrate-level ion implantation | Staffan Westerberg, David D. Smith | 2024-03-26 |
| 11921427 | Methods for making hard masks useful in next-generation lithography | Katie Lynn Nardi, Chenghao Wu | 2024-03-05 |