Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726409 | Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig | Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama, Shinichi Hatakeyama | 2023-08-15 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro +2 more | 2023-04-25 |