Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726409 | Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig | Yuichiro KUNUGIMOTO, Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama | 2023-08-15 |