Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809091 | Substrate processing apparatus and processing condition adjustment method | Masashi Enomoto, Kentaro Yamamura | 2023-11-07 |
| 11703459 | System and method to calibrate a plurality of wafer inspection system (WIS) modules | Michael A. Carcasi, Hiroyuki Iwaki, Toyohisa Tsuruda | 2023-07-18 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masashi Enomoto +2 more | 2023-04-25 |