Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11738363 | Bath systems and methods thereof | Michael A. Carcasi, Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Hiroshi Marumoto | 2023-08-29 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro, Masashi Enomoto +2 more | 2023-04-25 |
| 11624607 | Hardware improvements and methods for the analysis of a spinning reflective substrates | Michael A. Carcasi | 2023-04-11 |