Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Hiroyuki Iwaki, Masahide Tadokoro, Masashi Enomoto +2 more | 2023-04-25 |