Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703459 | System and method to calibrate a plurality of wafer inspection system (WIS) modules | Michael A. Carcasi, Toyohisa Tsuruda, Masahide Tadokoro | 2023-07-18 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Masahide Tadokoro, Masashi Enomoto +2 more | 2023-04-25 |