Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809091 | Substrate processing apparatus and processing condition adjustment method | Masahide Tadokoro, Kentaro Yamamura | 2023-11-07 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro +2 more | 2023-04-25 |
| 11604415 | Substrate processing method, substrate processing apparatus, and computer readable recording medium | Takashi Yamauchi, Shinichiro KAWAKAMI | 2023-03-14 |
| 11594424 | Substrate processing method and substrate processing apparatus | Takahiro Shiozawa | 2023-02-28 |