Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Hiroki TADATOMO, Akiko Kai, Hiroshi Ichinomiya | 2023-12-19 |
| 11594424 | Substrate processing method and substrate processing apparatus | Masashi Enomoto | 2023-02-28 |