Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Takahiro Shiozawa, Akiko Kai, Hiroshi Ichinomiya | 2023-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Takahiro Shiozawa, Akiko Kai, Hiroshi Ichinomiya | 2023-12-19 |