Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Takahiro Shiozawa, Hiroki TADATOMO, Akiko Kai | 2023-12-19 |
| 11720026 | Developing treatment method, computer storage medium and developing treatment apparatus | Akiko Kai, Kousuke Yoshihara, Kouichirou Tanaka | 2023-08-08 |