Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774854 | Substrate processing method, storage medium, and substrate processing apparatus | Yusaku Hashimoto, Masahiro Fukuda, Atsushi Ookouchi | 2023-10-03 |
| 11720026 | Developing treatment method, computer storage medium and developing treatment apparatus | Akiko Kai, Kousuke Yoshihara, Hiroshi Ichinomiya | 2023-08-08 |
| 11693322 | Liquid processing apparatus, liquid processing method, and computer-readable recording medium | Takuya MIURA, Shougo Takahashi | 2023-07-04 |