Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774854 | Substrate processing method, storage medium, and substrate processing apparatus | Kouichirou Tanaka, Masahiro Fukuda, Atsushi Ookouchi | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774854 | Substrate processing method, storage medium, and substrate processing apparatus | Kouichirou Tanaka, Masahiro Fukuda, Atsushi Ookouchi | 2023-10-03 |