Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Takahiro Shiozawa, Hiroki TADATOMO, Hiroshi Ichinomiya | 2023-12-19 |
| 11823918 | Substrate processing method and substrate processing apparatus | — | 2023-11-21 |
| 11720026 | Developing treatment method, computer storage medium and developing treatment apparatus | Kousuke Yoshihara, Kouichirou Tanaka, Hiroshi Ichinomiya | 2023-08-08 |