Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791180 | Substrate transfer system and load lock module | Masahiro DOGOME, Masatomo KITA | 2023-10-17 |
| 11742188 | Substrate processing method, pressure control apparatus and substrate processing system | Kazuyuki Miura | 2023-08-29 |
| 11705355 | Substrate transfer system and atmospheric transfer module | Toshiaki TOYOMAKI | 2023-07-18 |
| 11698648 | Gas supply system and gas supply method | Atsushi Sawachi | 2023-07-11 |
| 11644121 | Gas inspection method, substrate processing method, and substrate processing system | Risako Matsuda | 2023-05-09 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Kazuyuki Miura, Keita Shouji | 2023-02-21 |