Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735448 | Container, container partition plate, substrate processing system, and substrate transfer method | Seiichi Kaise, Masahiro Numakura, Yuki TAKEYAMA | 2023-08-22 |
| 11721564 | Substrate processing system and substrate transfer apparatus and method | — | 2023-08-08 |
| 11705355 | Substrate transfer system and atmospheric transfer module | Norihiko Amikura | 2023-07-18 |
| 11631607 | Carrier and jig | Seiichi Kaise | 2023-04-18 |