Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742228 | Substrate processing method and substrate processing system | Risako Matsuda, Shinobu KINOSHITA, Manabu Oie | 2023-08-29 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Norihiko Amikura, Kazuyuki Miura | 2023-02-21 |
| 11555755 | Method of calibrating multiple chamber pressure sensors | Risako Matsuda | 2023-01-17 |