Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742228 | Substrate processing method and substrate processing system | Shinobu KINOSHITA, Manabu Oie, Keita Shouji | 2023-08-29 |
| 11644121 | Gas inspection method, substrate processing method, and substrate processing system | Norihiko Amikura | 2023-05-09 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Norihiko Amikura, Kazuyuki Miura, Keita Shouji | 2023-02-21 |
| 11555755 | Method of calibrating multiple chamber pressure sensors | Keita Shouji | 2023-01-17 |