Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742188 | Substrate processing method, pressure control apparatus and substrate processing system | Norihiko Amikura | 2023-08-29 |
| 11585717 | Method for calibrating plurality of chamber pressure sensors and substrate processing system | Risako Matsuda, Norihiko Amikura, Keita Shouji | 2023-02-21 |