Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791180 | Substrate transfer system and load lock module | Norihiko Amikura, Masatomo KITA | 2023-10-17 |
| 11728205 | Device for transferring substrate, system for processing substrate, and method of processing substrate | — | 2023-08-15 |