Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837480 | Temperature controlling apparatus, temperature controlling method, and placing table | Kengo Kaneko | 2023-12-05 |
| 11791177 | Placing table including heat exchange medium path and substrate processing apparatus thereof | Masanori Takahashi, Shota EZAKI | 2023-10-17 |
| 11784066 | Stage and plasma processing apparatus | Shota EZAKI, Masanori Takahashi | 2023-10-10 |
| 11756806 | Heater power feeding mechanism | Dai KITAGAWA | 2023-09-12 |
| 11735392 | Plasma processing apparatus | Daisuke Hayashi, Kengo Kaneko | 2023-08-22 |
| 11705347 | Thermal regulator, substrate processing apparatus, and method of controlling temperature of stage | — | 2023-07-18 |
| 11694881 | Stage and plasma processing apparatus | Hiroki Endo, Naohiko Okunishi | 2023-07-04 |